Filtran Series, Filtered Tanks

Filter • Etch • Module

Submicron Recirculating Filter Etch Bath with Heating/Cooling Elements of fluoropolymer.

Reduce particle counts, improve yields and get a return of investment of just months with the FILTRAN Filter Etch Module. The FILTRAN consists of two major components; a process module which is integrated with a fluoropolymer immersion heater and a Process Control Module. A wide variety of models and options are available which will enable you to tailor a FILTRAN to meet your specific process requirements.

STANDARD FEATURES

Process Module

• Fluoropolymer or PVDF construction.
• Removable inner weir with dual bottom sparger rails and fluoropolymer false bottom.
• 1/8, 1/3 or 1/2 HP pump, dependent on model.
• N₂ purged pump motor.
• Adjustable weir gate.
• PTFE fluoropolymer heater with patented (patent numbers 4,554,024 - 4,158,764) N₂ purge feature, 110 or 208 Volt, 1 phase, wattage dependent on model ordered.
• Fluoropolymer sleeved J-type process thermocouple.
• Liquid level sensor (capacitance type).

• Temperature range up to 110°C depending on chemistry, concentration, etc.

Process Control Module

• Digital, P.I.D. based temperature controller.
• Heater purge controls.
• All operational switches.
• Kydex enclosure.

BENEFITS

• Lower Purchase Price:   Up to 45% less when compared to competitive systems by eliminating cumbersome and expensive remote circulators.
• Improved Yield / Lower Particle Counts: The high process solution turnover (up to two times per minute, up to 10.0 GPM flow rate) results in rapid bath cleanup for improved yields and lower particle counts.
• Rapid Return of Investment: Get a return of investment in as little as 2.4 to 8.6 months of operation when upgrading to FILTRAN Filter Etch Modules from non- filtered static baths (refer to FILTRAN - Product Bulletin 01-012-0003 for complete details).
• Elimination of Particulate Build-Up: Skimming action of full 360 degree overflow weir prevents "dead spots" and eliminates particulate buildup on the process solution surface.
• Fast Ramp Up and Temperature Recovery: The heating and cooling elements are in direct contact with the process solution. The heat-up rate and temperature recovery are up to five times faster than competitive baths that use typical "indirect transfer" methods.

SAFETY AND DESIGN

• Reliable - Years of field-proven reliability.
• Heater Integrity - Patented N₂ purge (patent numbers 4,553,024 - 4,158,764) removes any liquid diffusion within the heater that may occur.
• Controls - Easy to use pre-wired process control module.
• Operator Safety - The process solution remains in the bath at all times. Heater protection is provided through electrical interlocks. (i.e., Standard over-temperature thermocouple and liquid level sensor).

OPTIONS

• Process filters.
• Refrigeration unit.
• TCC fluoropolymer cooling coils.
• Other voltages/frequencies.

ELECTRICAL SERVICE

• Pump Motor: 110V, single phase 50/60Hz.
• Heater: 110 or 208V, single phase 50/60Hz.
  

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