RB Series, Constant Temperature Baths
Precise
Control of Process and Temperature with Heating Cooling Elements, Condensing
Head and Cover of Fluoropolymer.
K O H • Condensing • Bath
The RB (Reflux Bath) Series is intended
for KOH (micromachining) and related processes. The system incorporates a
condensing head and cover for condensing process vapors. It offers excellent
process control and an ultra-clean semiconductor grade process environment. The
system consists of two major components, a process tank assembly which is
integrated with a
fluoropolymer immersion heater and
a process control module. Each unit includes a network of safety features and is
supplied complete with all necessary components such as process thermocouples,
liquid level sensors etc. A wide variety of models and options are available
which will enable you to tailor an RB to meet your specific process
requirements.
Click here to view diagram
STANDARD
FEATURES
Process Tank
- Fluoropolymer or
PVDF condensing head and cover.
- Fluoropolymer
process tank.
- PTFE fluoropolymer
heater with patented (patent numbers 4,553,024 - 4,158,764) N2
purge feature, wattage dependent on model ordered.
- Fluoropolymer
sleeved J-type process thermocouple.
- J Type
over-temperature thermocouple.
- Liquid level sensor
(capacitance type).
Process Control Module
- Digital, PID based
temperature controller.
- Heater purge
controls.
- All operational
switches.
- Kydex enclosure.
- Wide range of
voltages available.
BENEFITS
- Use with KOH
or any acid including HF.
- Condensing
head, coils and lid reduces process solution evaporation.
- Fast heat up
and temperature recovery: The heating and or cooling elements
directly contact the process solution resulting in a faster heat-up and
recovery rate.
- Temperature
stability and uniformity: The RE heater takes up the entire bottom of
the tank eliminating temperature gradients resulting in more uni form etch
rates. Temperature range up to 180°C depending on chemistry, concentration,
etc.
- Minimal
downtime: The RE heater exhibits long life, however when replacement
is necessary it can be done more quickly, on-site and less expensively than
many other styles of baths.
- More
durable: The fluoropolymer tank is very durable and is virtually
unbreakable.
- Warranty:
Standard one year.
SAFETY
AND DESIGN
- Controls:
Easy to use pre-wired Process Control Module.
- Condensing head
and cover: Aids in maintaining process solution concentration and
temperature stability.
- Heater integrity:
Patented N2 purge helps remove any liquid permeation that may occur
within the heater.
- Operator safety:
Heater protection is provided through electrical interlocks. i.e, (Standard
overtemperature thermocouple and liquid level sensor).
- Reliable:
Field-proven for years.
OPTIONS
- Drain connection and
valve.
- TCC fluoropolymer
cooling coil.
- Microprocessor
controller.
- Refrigeration unit.
- Timer.
- Sparger plate.
- Magnetic stir bar.
ELECTRICAL SERVICE
- Heater: 110 or 208V,
single phase 50/60 Hz.
- 3 phase, custom
wattages and voltages available upon request.
For more information on this, or any
other product, please contact our offices and visit our contact
page.
